Lithography
Metrology
| Alpha Step Surface Profiler |
| X-Ray Interferometer |
| Zygo 4" Interferometer |
| Veeco General Purpose Phase Shifting Interferometer |
| Fisba-Optik Micro Interferometer |
Imaging and Characterization
| Z-scan Apparatus |
| Nano Alignment Systems |
| JEOL Scanning Electron Microscope |
| Veeco Scanning Probe Microscope |
|
Tektronix Semiconductor Parameter Tester |
| Woolam Spectroscopic Ellipsometer |
| Veeco Nanoscope IV SPM Control Station |
| Spectrometers and Microscopes |
| STN Probe Station |
| Cathodoluminescence |
| EDAX |
| Deep Level Transient Spectroscopy |
Laser Facility
| Fiber Laser Modules |
| Continuum Pulsed Q-Switched NDYag Laser |
| Research Grade Optical Tables |
| ExcelYag Laser Opotic System |
| Femtosecond Laser System |
Simulation and Modeling
| EM Premier Workstation |
| Rsoft |
| FemLab |
|
FDTD | |
Materials Deposition and Etching
| Rapid Thermal Process System |
| Omicron STM/AFM System |
| AJA Ion Milling System |
| AJA Sputtering Tool |
| ICP Compound Semiconductor Etch System |
| ICP Dielectric Etch System |
| ICP Deep Silicon Etch System |
|
PECVD |
| MOCVD |
|
K&S Wire Bonder |
| Scribe and Break Tool |
| Evaporator |
| Flip-chip Bonder |
| Supercritical Drying Station |
Networking and Fiber Optics
Clean Room Basic Operations
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