Metrology

In order to sustain research, development, and training in metrology, facilities are maintained to manufacture components at the required levels. For critical measurement, many instruments are housed in a 1500 sq. ft. controlled environment, 20° ± 0.1° C, class 10,000 metrology laboratory. Other laboratories include computer-aided design, manufacturing, and modeling, precision motion systems, precision electro-optical systems, mechatronics, scanned probe microscopes, and instrument development, supported by a precision machine shop and an electronics shop. Laboratories and offices currently occupy over 33,000sq. ft. of the 100,000 sq. ft. in Duke Centennial Hall.

The capabilities of the Lab include a wide variety of coordinate metrology, surface finish and various traditional dimensional metrology instrumentation. Currently there are five computer controlled coordinate measuring machines (CMMs) in the facility with various touch trigger, scanning, and vision based probing systems.  In the area of surface metrology, there are a half-dozen contact and non-contact based instruments to measure two and three dimensional surface finish and form. There are also a number of dimensional metrology instruments for measuring both form and size including;

• Alpha Step Surface Profiler
• X-Ray Interferometer
• Zygo 4" Interferometer
• Veeco General Purpose Phase Shifting Interferometer
• Fisba-Optik Micro Interferometer

Center for Precision Metrology